The fundamental principles and parameters of sputter coating have been utilized to advance the LUXOR A 2 technology, which serves as the core of the latest series of LUXOR metal sputter coaters. How ...

The MEGA coating system (multi-source magnetron sputtering system) enables the production of new types of metallic or ceramic coatings in monolithic, graded or multi-layer arrangements using 7 ...

This report provides an updated review of sputtering technologies and a description of various types of sputtering targets and their fabrication methods and identifies current and emerging ...

Thin films play a crucial role in the fabrication of several components and devices, such as protective coatings, integrated circuits, solar cells, and optical ...

Many applications use a manufacturing process known as thin-film sputtering deposition. The typical sputtering process uses an ion beam to impact the surface of a sputter material such as gold, silver ...

ULVAC is shipping PZT piezoelectric thin-film sputtering equipment which advances the development of MEMS devices. It used to be impossible to fabricate PZT piezoelectric thin films, which constitute ...

THE cathodic sputtering process has been almost completely replaced in recent years by the vacuum evaporation technique for the production of thin solid films. However, renewed interest in the ...